PLASMA DISCHARGER

摘要

A plasma discharger in which a uniform energy distribution can be obtained over a wide range even for a rotating disc-like workpiece. In a plasma discharger where corona discharge is generated between a pair of rod-like discharge electrodes (6, 7) by applying a pulse voltage between them and the surface of a workpiece (W) is irradiated with an exciting species containing plasma generated by corona discharge, the pair of discharge electrodes (6, 7) are formed asymmetrically and one discharge electrode (6) is formed into substantially doglegged-shape. Pointed end part (6a) of the discharge electrode (6) is located at the outer circumferential part of the disc- like workpiece (W) being processed while being rotated. The bent base end part of the other discharge electrode (7) formed into substantially V- shape is located at the central part of rotation of the disc-like workpiece (W) being processed while being rotated. The pointed end part (6a) of one discharge electrode (6) and the pointed end part (7a) of the other discharge electrode (7) are located at different phase heights on the axis along the ejecting direction of plasma.