摘要 |
<p>The invention relates to a device for white light interferometry comprising a light source having a main emission wavelength lambda 0 and spectral width DELTA lambda and an evaluation unit provided with a linear sensor of a pixel width P for detecting the interference fringe patterns in an interfringe distance F, wherein a mask which is placed in front the linear sensor exhibits a permeability with respect to periodically modulated along said linear sensor light and wherein the period length of the mask M is arranged in such a way that the condition (I) is satisfied.</p> |