| 摘要 |
PROBLEM TO BE SOLVED: To provide a finger chuck with draw bars widely position-adjustable in the radial direction of the chuck and each position-changeable in the radial direction. SOLUTION: The draw bar 15 composed of a rotary draw bar 13 and a pawl side draw bar 14 is arranged on a chuck body 2 in parallel to a chuck axis CL. To a velum 19 which is provided at the tip of the rotary draw bar 13 so as to be moved forward/backward along the chuck axis CL and turned around a draw bar axis DL1, the base end 14a of the pawl side draw bar 14 is connected to be movable in the direction of the diameter of the velum. The turning angle of the velum 19 and the position of the pawl side draw bar 14 relative to the velum 19 can be selected when the pawl side draw bar 14 is arranged at a selective position in a velum region A. COPYRIGHT: (C)2006,JPO&NCIPI
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