TESTING DEVICE AND TESTING METHOD, INTEGRATED CIRCUIT DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To make it possible to measure a plurality of patterns by providing probe needles required for testing of one IC chip to one probe card. SOLUTION: The testing device is provided with a placement table for placing an object to be tested, a driving mechanism for moving the placement table in four directions and a plurality of probe needles arranged opposite to the placement table. The placement table is moved by the driving mechanism, so that the probe needles are brought into contact with the object placed on the placement table to test the object. At least any one of the relative distances between the respective electrodes of the object and contact parts of the probe needles corresponding to the respective electrodes is made different from the others. COPYRIGHT: (C)2006,JPO&NCIPI