发明名称 JOINING DEVICE AND JOINING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a joining device and a joining method for surely positioning a light transmissive first planar body and a second planar body and highly accurately joining and fixing both by surely imaging the images of a first positioning mark in the light transmissive first planar body and a second positioning mark in the second planar body. SOLUTION: The joining device 1 joins and fixes the first planar body 8 having the first positioning mark 82 and the second planar body 9 having the second positioning mark through a gap 101. The joining device 1 is provided with a displacing means for relatively displacing the first planar body 8 and the second planar body 9 and an imaging means 5 for imaging the images of the first positioning mark 82 and the second positioning mark 92 from the side of the first planar body 8, and is constituted so as to fix both planar bodies by displacing the first planar body 8 and the second planar body 9 such that the images of the respective marks match. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006259254(A) 申请公布日期 2006.09.28
申请号 JP20050076854 申请日期 2005.03.17
申请人 SEIKO EPSON CORP 发明人 FUJIMORI EIJIRO
分类号 G09F9/00;G02F1/13;H01L51/50;H05B33/10 主分类号 G09F9/00
代理机构 代理人
主权项
地址