OPTICAL PROBE, ITS MANUFACTURING METHOD, AND ELECTROLESS NICKEL PLATING LIQUID

摘要

PROBLEM TO BE SOLVED: To apply a metal coating to a linear structure such as a sharpened fiber or three-dimensional microfabrication with high reproducibility by an electroless plating process. SOLUTION: A metal coating layer whose metal film thickness decreases toward the tip and having step structure with width of 10 nm or more and level difference of 50 nm or less in a reduction area is formed by electroless nickel plating at an acute part of the tip of an optical probe by electroless nickel plating by using malic acid as a base and immersing the acute part of the tip of the surface activated optical probe in electroless nickel plating liquid containing short-chain fatty acid-based organic acid such as acetic acid and glycolic acid. COPYRIGHT: (C)2006,JPO&NCIPI