OPTICAL MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an optical microscope achieving the shortening of measuring time. SOLUTION: The optical microscope is equipped with: a laser beam source 11; a cylindrical lens 15 converting a laser beam into a linear light beam; a galvano mirror 23 making the linear light beam scan; an objective 27 condensing the light beam made to scan by the galvano mirror 23 to be linear; a 1st beam splitter 22 branching emitted light 62 whose wavelength is different from laser wavelength and which is emitted from a sample 28 to the objective 27 side from the laser beam; a spectroscope 33 having an incident slit 32 arranged on an incident side on which the emitted light 62 branched by the 1st beam splitter 22 is made incident and spatially dispersing the emitted light 62 passing through the incident slit 32 in accordance with the wavelength; and a detector 34 detecting the emitted light 62 dispersed by the spectroscope 33. COPYRIGHT: (C)2006,JPO&NCIPI