| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor of small temperature zero error. SOLUTION: This pressure sensor provided with a recessed part provided in a sensor chip and for constituting a diaphragm of a resilient part in the sensor chip, a pressure detecting element provided in the resilient part of the sensor chip, and a chip support body with one face connected to one face of the sensor chip and for constituting the recessed part and a low pressure side pressure introduction chamber, a high-pressure side pressure introduction chamber provided in an outer circumference of the sensor chip and the chip support body, and a sealing liquid provided in either of the low pressure side pressure introduction chamber or the high pressure side pressure introduction chamber. The pressure sensor is provided with the chip support body connected to the sensor chip to negate a strain acting on the pressure detecting element by the sealing liquid. COPYRIGHT: (C)2006,JPO&NCIPI
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