| 摘要 |
<p>PURPOSE: To position all chips accurately and quickly by an optimum quantity of pitch shifting even if the interval between chips are different partially. CONSTITUTION: When arranging a chip in the specified position while shifting a mobile table, based on the recognition data being obtained by photographing many chips which are arranged at specified pitches in lattice shape, being mounted on a mobile table, by means of a camera, and processing the image signal by the camera with an image processor, the intervals Pn, Pn-1, and Pn-2 between chips and the direction of arrangement are computed from the recognition data of a plurality of chips Tn-1 , Tn-2 , and Tn-3 positioned right before it, and based on the computation result, the interval Pn+1 between chips to the chip Tn+1 to be the next object of recognition and the direction of arrangement are forecast, and based on the forecast data, the mobile table is shifted by pitches.</p> |
