| 摘要 |
PROBLEM TO BE SOLVED: To provide a lattice distortion evaluation method of high resolution, and an evaluation device therefor. SOLUTION: In this lattice distortion evaluation method for a crystal material, the crystal material is irradiated with an electron beam, and a lattice distortion of the crystal material is evaluated based on a contrast of transmission wave intensity to diffraction wave intensity. The lattice distortion evaluation method has (1) the first process for finding an electron beam incident azimuth of bringing a ratio of a contrast in an area having the lattice distortion to a reference contrast in an area having no lattice distortion into the maximum, within a prescribed angle range from an axis along a direction perpendicular to a surface of the crystal material, in a plurality of crystal faces in the crystal material, (2) the second process for selecting the optimum crystal face and the optimum electron beam incident azimuth, based on the found contrast ratio of the plurality of crystal faces, and (3) the third process for setting the electron beam irradiation in the selected crystal face and optimum electron beam incident azimuth, and for evaluating a degree of the lattice distortion in response to intensity of a transmission wave image or diffraction wave image obtained by irradiating the crystal material with the electron beam. COPYRIGHT: (C)2006,JPO&NCIPI
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