| 摘要 |
A drive unit is provided that is capable of providing a high-accuracy measurement operation while suppressing a posture change of a detector even if the detector is moved. The drive unit includes a cross section of horizontally-oriented-U-shape guide rail provided to a frame, and the outside to be parallel to the movement direction of a roughness detector; a slider formed to be able to freely slide along the guide rail, and configures a frame being rectangular in cross section to include a detector therein; biasing member that biases the slider against the guide rail; and drive device that moves the slider along the guide rail. The drive unit is configured to include a motor, a ball screw axis to be driven by the motor, and a nut member that is screwed to the ball screw axis, and is coupled to the slider. The ball screw axis is disposed in the vicinity of the substantial center of sliding surfaces of the slider.
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