| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate switching work and management of a positioning member and to position a sheet body at a desired position not depending on a size. <P>SOLUTION: Two positioning holes 64a-64h on an exposure stage 18 according to a size of a substrate F are selected and positioning pins 66a, 66b of a positioning member 60 are engaged with the selected positioning holes 64a-64h. Subsequently, two step parts 68a-68f corresponding to the size of the substrate F of the positioning member 60 are selected and a corner part of the substrate F and a surface extending from the corner part are abutted on the selected step parts 68a-68f. Thereby, positioning of the substrate F is performed making a center of the exposure stage 18 as a reference. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
