| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring microscope efficiently measuring a height of a test substance. SOLUTION: The measuring microscope comprises: a white light source 4; a confocal disk 8 consisting of an optical transmitter 8a which light can freely pass through, and a Nipkow disk 8c in which confocal pinholes 8b of a plurality of small holes are arranged only to transmit the light of a predetermined color (for example, a color with a low-level focus depth like red), and which rotates around a rotation axis 8d at a predetermined rotation speed; an illumination optical system 2 which irradiates the illumination light from the white light source 4 to the test substance through the confocal disk 8 and a predetermined lens system; a measurement optical system 3 (confocal optical systems); and an image pickup device 12 which receives a returned light from the test substance 14 through the confocal optical systems 2 and 3, and obtains an image of the test substance 14. The image of the test substance 14 obtained by the image pickup device 12 is composed in such a manner that the bright-field image of the test substance 14 obtained by the transmission of the returned light through the transmitter 8a, and the confocal image of the test substance obtained by the transmission through the Nipkow disk 8c, are overlapped. COPYRIGHT: (C)2006,JPO&NCIPI
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