| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect detection device capable of easy and accurate defect detection when a plurality kinds of surface states of an inspection object to be determined to be a nondefective article exist. <P>SOLUTION: In this defect detection device for detecting a defect of the inspection object by processing image information of the inspection object acquired by imaging the surface state of the inspection object which is an object to be inspected, a mode determination means 103 determines to which surface mode the inspection object is pertinent by comparing inspection frequency information determined by subjecting image information acquired by imaging the inspection object to frequency conversion with standard frequency information in each surface mode stored in a standard frequency information storage means, and a defective image generation means 104 generates a defective image by subjecting to reverse frequency conversion, a frequency component extracted by taking a difference between the inspection frequency information and the standard frequency information corresponding to the surface mode determined by the mode determination means, and a defect determination means 105 determines existence of a defect of the inspection object by the defective image. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
