发明名称 TEMPERATURE MEASUREMENT SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a temperature measurement system capable of discriminating troubles in a temperature sensing element. SOLUTION: The temperature measurement system 1 comprises a first temperature sensing element 101 for measuring the temperature of a measuring object APM, a second temperature sensing element 102 for measuring the temperature of a measuring object APM, and a monitor section 120 for monitoring each temperature measured with the first temperature sensing element 101 and the second temperature sensing element 102. By monitoring the difference between the temperature measured with the first temperature sensing element 101 and the temperature measured with the second temperature sensing element 102, a trouble at the first temperature sensing element 101 or the second temperature sensing element 102 is to be detected. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006234382(A) 申请公布日期 2006.09.07
申请号 JP20030147212 申请日期 2003.05.26
申请人 TOKYO ELECTRON LTD 发明人 NAKATO ISAMU
分类号 G01K7/18;G01K15/00 主分类号 G01K7/18
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