发明名称 Refractory metal-based electrodes for work function setting in semiconductor devices
摘要 The present invention provides, in one embodiment, a gate structure ( 100 ). The gate structure comprises a gate dielectric ( 105 ) and a gate ( 110 ). The gate dielectric includes a refractory metal and is located over a semiconductor substrate ( 115 ). The semiconductor substrate has a conduction band and a valence band. The gate is located over the gate dielectric and includes the refractory metal. The gate has a work function aligned toward the conduction band or the valence band. Other embodiments include an alternative gate structure ( 200 ), a method of forming a gate structure ( 300 ) for a semiconductor device ( 301 ) and a dual gate integrated circuit ( 400 ).
申请公布号 US7098516(B2) 申请公布日期 2006.08.29
申请号 US20040852523 申请日期 2004.05.24
申请人 发明人
分类号 H01L29/94;H01L21/3205;H01L21/8234;H01L21/8238;H01L29/49;H01L29/76;H01L29/78 主分类号 H01L29/94
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