| 摘要 |
An optical metrology system having an optical metrology sensor assembly and a target is disclosed. The optical metrology sensor assembly transmits a light beam to the target and then uses the reflected beam from the target to determine the position of the target in three dimensions. The optical metrology sensor can comprise a light source, a ranging device, and a two-dimensional sensor. The optical metrology system is suitable for applications such as determining the position, orientation, and shape of a spacecraft antenna, so as to facilitate movement thereof to enhance operation of the antenna.
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