Optical waveguide manufacturing method

摘要

A method for manufacturing an optical waveguide of the present invention is one in which a mask is provided on the surface of a core layer followed by performing dry etching, and the dry etching step includes etching and ashing steps. With this, the irregularities formed on the periphery of a core pattern during manufacture of an optical waveguide can be eliminated, and an optical waveguide with a low optical transmission loss is proved.