| 摘要 |
PROBLEM TO BE SOLVED: To improve a ratio of detecting signal to a noise by inhibiting a leakage current generated by an alkali metal segregated by a surface layer of a glass substrate, when the glass substrates and a silicon substrate are anode-bonded. SOLUTION: This sensor comprises a pair of glass substrates 20, the silicon substrate 21 which is sandwiched between a pair of the glass substrates 20 and bonded to them by anode-bonding, a plurality of thin film terminals 36a, etc. which are electrically connected to the silicon substrate 21 while formed on a surface 51 of the glass substrate 20b, one of the glass substrates on the reverse side of the surface to which the silicon substrate 21 is bonded, and surface notches 60 formed at each space between the thin film terminals 36a, etc. on the surface on which a plurality of the thin film terminals 36a, etc. are formed. COPYRIGHT: (C)2006,JPO&NCIPI
|
