| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of simply forming a nozzle plate of an inkjet head having nozzle holes of a two-tier cross-section, the discharge surface 1 of which is one plane. SOLUTION: In the nozzle plate of an inkjet head, the discharge surface 1 of which is one plane, and having nozzle holes of a two-tier cross-section, the manufacturing method of an inkjet head comprises the process of processing second nozzle holes and an ink supply opening by an anisotropic dry etching method, the process of forming an oxide film on the surface treated by the anisotropic dry etching, the process of making the second nozzle holes and first nozzle holes by anisotropic dry etching the first nozzle holes from the surface opposite to the surface treated by the anisotropic dry etching. COPYRIGHT: (C)2006,JPO&NCIPI
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