| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor storage container opening/closing device capable of preventing foreign matter from entering a storage container and reducing the foreign matter from being attached to a wafer when the storage container is opened by using the storage container opening/closing device. SOLUTION: In the semiconductor storage container opening/closing device 100, the maximum opening speed of the semiconductor storage container is designed to be set to speed differential pressure ratio divided by a differential pressure between the internal pressure of a semiconductor manufacturing device and an external pressure outside the device, which is 0.06 (m/s×Pa) or less. COPYRIGHT: (C)2006,JPO&NCIPI
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