发明名称 Dual gate FinFet
摘要 A field effect transistor (FET), integrated circuit (IC) chip including the FETs and a method of forming the FETS. Each FET includes a device gate along one side of a semiconductor (e.g., silicon) fin and a back bias gate along an opposite of the fin. Back bias gate dielectric differs from the device gate dielectric either in its material and/or thickness. Device thresholds can be adjusted by adjusting back bias gate voltage.
申请公布号 US7091566(B2) 申请公布日期 2006.08.15
申请号 US20030717737 申请日期 2003.11.20
申请人 INTERNATIONAL BUSINESS MACHINES CORP. 发明人 ZHU HUILONG;BEINTNER JOCHEN;DORIS BRUCE B.;ZHANG YING
分类号 H01L29/76;H01L21/336;H01L21/84;H01L27/01;H01L27/12;H01L29/78;H01L29/786;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
代理机构 代理人
主权项
地址
您可能感兴趣的专利