| 摘要 |
PROBLEM TO BE SOLVED: To provide a microstructure having a wall part having the high aspect ratio, by finely forming a large number of recessed parts and wall parts having a desired dimension. SOLUTION: This master pattern having a dimensional shape of reversing the microstructure 11, is manufactured by forming a large number of groove parts having a desired dimension and the high aspect ratio, by using elliptically vibrating cutting work. A primary duplicate pattern having the same dimensional shape as the microstructure 11 is respectively formed by using the master pattern by Ni plating, and a secondary duplicate pattern 8 having a dimensional shape of reversing the microstructure 11 is formed by using the primary duplicate pattern. The microstructure 11 provided with a plurality of recessed parts 12 composed of a predetermined dimensional shape and the wall parts 13 having a desired dimension and the high aspect ratio between the recessed parts 12, is manufactured by applying Ta plating to this secondary duplicate pattern 8. COPYRIGHT: (C)2006,JPO&NCIPI
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