METHOD OF MANUFACTURING GETTER MATERIAL, METHOD OF MANUFACTURING EVAPORATION TYPE GETTER DEVICE USING IT, AS WELL AS METHOD OF MANUFACTURING ELECTRONIC TUBE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method in which vaporization amount of getter components becomes possible to appropriately control without excess or deficiency in a stable state, and furthermore, the time from heating initiation until the getter components start evaporation is short, and a getter material and an evaporation type getter device with excellent responsiveness can be obtained.

SOLUTION: This is the getter material which is constituted of a compact blend composed of Ba-Al alloy powder and Ni powder, and when this getter material is heated in vacuum or in inert gas, the temperature in which the compact blend starts exothermic reaction is in the range of 750°C or more and 900°C or less.

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