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发明名称
摘要
申请公布号
JP3808114(B2)
申请公布日期
2006.08.09
申请号
JP19950158789
申请日期
1995.06.02
申请人
发明人
分类号
C23C14/35;H01J37/34
主分类号
C23C14/35
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