发明名称 |
Control of overlay registration |
摘要 |
A system and method are disclosed for controlling a registration overlay. The method comprises estimating a state using moving horizon estimation and determining an input of the registration overlay using the state. The system comprises an estimator configured to determine a state using moving horizon estimation; and a regulator configured to determine an input of the registration overlay using the state.
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申请公布号 |
US7089164(B2) |
申请公布日期 |
2006.08.08 |
申请号 |
US20030665980 |
申请日期 |
2003.09.19 |
申请人 |
MODEL PREDICTIVE SYSTEMS, INC. |
发明人 |
MIDDLEBROOKS SCOTT A. |
分类号 |
G06F17/10;G03F7/20;H01L;H01L21/00 |
主分类号 |
G06F17/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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