| 摘要 |
A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the first diaphragm, and a second conductive layer on the plate, the first and second conductive layers being the electrodes of a capacitor whose capacitance varies with the position of the diaphragm relative to the plate. |
| 申请人 |
ANALOG DEVICES, INC.;O'DOWD, JOHN;MCCARTNEY, DAMIEN, JOSEPH;HUNT, WILLIAM;HYNES, EAMON;WYNNE, JOHN, M.;CROWLEY, PATRICK;MARTIN, JOHN, R. |
发明人 |
O'DOWD, JOHN;MCCARTNEY, DAMIEN, JOSEPH;HUNT, WILLIAM;HYNES, EAMON;WYNNE, JOHN, M.;CROWLEY, PATRICK;MARTIN, JOHN, R. |
