| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the accuracy of a surface shape to be formed while forming the surface shape of a structure in a short period of time at a low cost. <P>SOLUTION: This surface shape forming apparatus is equipped with a resist forming means for forming the resist of a prescribed shape to a prescribed surface of the structure 1, and an etching means for subjecting the prescribed surface of the structure 1 in which the resist is formed to etching processing. The resist forming means is equipped with a resist sticking means for sticking a resist material to the prescribed surface of the structure 1, and a laser irradiation means for irradiating the stuck resist material with a laser beam to remove a part of the resist material, so as to form the material to the prescribed shape. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
