发明名称 METHOD FOR FORMING PATTERN, LIQUID DROPLET DISCHARGE HEAD, APPARATUS FOR FORMING PATTERN, METHOD FOR MANUFACTURING COLOR FILTER SUBSTRATE, COLOR FILTER SUBSTRATE, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRO-OPTICAL DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for forming a pattern, which is used for improving the uniformity and productivity of a pattern shape and to provide a liquid droplet discharge head, an apparatus for forming the pattern, a method for manufacturing a color filter substrate, the color filter substrate, a method for manufacturing an electro-optical device and the electro-optical device. <P>SOLUTION: A vibration part is arranged for imparting the vibration consisting of a head amplitude value and head frequency fh to the liquid droplet discharge head. When an object discharge nozzle Rj intrudes into the upper part of a corresponding red-colored layer formation area, the liquid droplet discharge head is vibrated by the vibration part. A minute liquid droplet Ds is discharged from the object discharge nozzle Rj to form a red-colored layer during the time when the center of the object discharge nozzle Rj faces a discharge area Sj of the corresponding red-colored layer formation area. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006198536(A) 申请公布日期 2006.08.03
申请号 JP20050013701 申请日期 2005.01.21
申请人 SEIKO EPSON CORP 发明人 ITO TATSUYA
分类号 B05D1/26;B05C5/00;G02B5/20;G02F1/13;G02F1/1335;H01L51/50;H05B33/10 主分类号 B05D1/26
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