| 摘要 |
PROBLEM TO BE SOLVED: To realize a planar motor for preventing position errors from generating. SOLUTION: This plane motor, comprising an interferometer, constituted of a plurality of sliders and a semiconductor laser light source provided on a platen, is used for detecting the positions of the sliders. This planar motor is characterized by being equipped with the single semiconductor laser light source for use in the interferometer to detect the positions of the plurality of sliders. COPYRIGHT: (C)2006,JPO&NCIPI
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