| 摘要 |
PROBLEM TO BE SOLVED: To prevent an organic substance from dissolving in pure water charged in a gap between a liquid-immersion objective lens and a sample, and also, to improve yield by preventing the increase in DO. SOLUTION: A chamber 40 is arranged near the leading end part of the cylindrical member 20b of a lens barrel 20, and the discharge opening of a supply nozzle 35 is connected to the chamber 40. Then, when pure air is jetted into the chamber 40 through the supply nozzle 35, the pure air cleaned by an FFU 30 and containing no organic substance and no particle is supplied around the pure water PW near the focal position of the liquid immersion objective lens 8 (that is, in between the liquid-immersion objective lens 8 and the wafer W). Thus, the periphery of the pure water PW is locally purged by the pure air, then, the pure water PW is not exposed in the air containing the organic substance, and the organic substance in the air never dissolves in the pure water PW. COPYRIGHT: (C)2006,JPO&NCIPI
|
