| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the performance or characteristics of an antenna device having a multilayer structure of a dielectric layer and a conductor layer. SOLUTION: One or more antenna electrodes 112, 112, ... are arranged on one surface of a ceramic substrate 100 which has a constant permittivity and has an extremely smooth surface and has a purity of 97% or above. On the other surface of the high purity ceramic substrate 100, a ground electrode 113 is arranged. On the ground electrode 113, a first dielectric film 120 is formed. Electronic circuits 132, 132, ... such as switching circuits for controlling the antenna electrodes are formed on the first dielectric film 120, and a second dielectric film 130 having a high dielectric constant is formed on the antenna electrodes 112, 112, .... The antenna electrodes 112 and the ground electrode 113 are formed in 3μm or less in thickness by the PVD method, while the dielectric films 120 and 130 are formed in 0.1 mm or less, preferably in 10μm or less, in thickness by the aerosol deposition method. COPYRIGHT: (C)2006,JPO&NCIPI |
