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发明名称
Device for cleaning a polishing head for semiconductor polishing process
摘要
申请公布号
KR100607162(B1)
申请公布日期
2006.08.01
申请号
KR19990036669
申请日期
1999.08.31
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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