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发明名称
Method of forming a capacitor in a semiconductor device
摘要
申请公布号
KR100604555(B1)
申请公布日期
2006.07.28
申请号
KR20010035569
申请日期
2001.06.21
申请人
发明人
分类号
H01L21/3065;H01L27/108;H01L21/02;H01L21/311;H01L21/768;H01L21/8242;H01L23/522
主分类号
H01L21/3065
代理机构
代理人
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地址
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