摘要 |
PROBLEM TO BE SOLVED: To increase pressure tightness against pressure fluctuation from the outside in a diaphragm-sealed, differential pressure detection pressure sensor comprising a case, a sensor element which is provided in the case to output signals on the basis of pressure applied, and pressure introduction channels which are provided in the case to introduce pressure into the sensor element. SOLUTION: The pressure sensor S1 comprises the case 10, the sensor element 20 which is in the case 10 to output signals on the basis of pressure applied, and the first and second pressure introduction channels 11a, 11b which are provided in the case 10 to introduce pressure into the sensor element 20. The second pressure introduction channel 11b is provided with a gel member 200 as a pressure fluctuations relaxation member for relaxing fluctuations in the pressure applied to the sensor element 20. COPYRIGHT: (C)2006,JPO&NCIPI
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