发明名称 |
WAFER SUPPORT PIN ASSEMBLY |
摘要 |
A semiconductor wafer support pin assembly. A susceptor has at least three support pins configured to raise a wafer above the top surface of the susceptor. Each support pin includes and upper pin and a lower pin, which lock together by means of a quick-release mechanism in the form of a bayonet mount. The upper pin is made of a non-metallic material, such as polybenzimidazole. The susceptor is driven up and down by a lifting mechanism, driven by an electric motor or pneumatic cylinder. The susceptor moves up and down, relative to the support pins. |
申请公布号 |
WO2006078585(A2) |
申请公布日期 |
2006.07.27 |
申请号 |
WO2006US01400 |
申请日期 |
2006.01.17 |
申请人 |
ASM AMERICA, INC.;FONDURULIA, KYLE;WHITE, CARL |
发明人 |
FONDURULIA, KYLE;WHITE, CARL |
分类号 |
H01L21/44;C23C16/00 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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