发明名称 |
Method for making a contact magnetic transfer template |
摘要 |
A contact magnetic transfer (CMT) master template is made by first adhering a plastic film to a first surface of a silicon wafer. A resist pattern is then formed on the polyimide film and the polyimide is reactive-ion-etched through the resist to form recesses. The resist is removed and a chemical-mechanical-polishing (CMP) stop layer is deposited over the non-recessed regions of the polyimide, and optionally into the bottoms of the recesses. A layer of magnetic material is then deposited over the polyimide film to fill the recesses. A CMP process is then performed to remove magnetic material above the recesses and above the non-recessed regions and continued until the CMP stop layer is reached. The resulting upper surface of the polyimide film is then a continuous planar film of magnetic islands and regions of CMP stop layer material that function as the nonmagnetic regions of the template. |
申请公布号 |
US2006163195(A1) |
申请公布日期 |
2006.07.27 |
申请号 |
US20050044288 |
申请日期 |
2005.01.26 |
申请人 |
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发明人 |
BANDIC ZVONIMIR Z.;ERPELDING A. D.;KATINE JORDAN A.;LE QUANG;LEE KIM Y.;LI JUI-LUNG;ROOKS MICHAEL J. |
分类号 |
B44C1/22;C03C25/68;C23F1/00 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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