A METHOD OF TREATING A COMPONENT OF A DEPOSITION APPARATUS,申请号EP20040788650-传众专利搜索

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发明名称	A METHOD OF TREATING A COMPONENT OF A DEPOSITION APPARATUS
摘要
申请公布号	EP1682689(A2)	申请公布日期	2006.07.26
申请号	EP20040788650	申请日期	2004.09.10
申请人	HONEYWELL INTERNATIONAL INC.	发明人	KIM, JAEYEON;SAYLES, SCOTT, R.;KARDOKUS, JANINE, K.;PHELAN, TERRY, J.
分类号	C23C14/56;B08B7/00;B24C1/00;B24C11/00;C23C14/34;C23C16/44	主分类号	C23C14/56
代理机构		代理人
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