Lithographic projection apparatus and actuator,申请号SG20050008422-传众专利搜索

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发明名称	Lithographic projection apparatus and actuator
摘要
申请公布号	SG123783(A1)	申请公布日期	2006.07.26
申请号	SG20050008422	申请日期	2005.10.27
申请人	ASML NETHERLANDS B.V.	发明人	CADEE THEODORUS PETRUS MARIA
分类号		主分类号
代理机构		代理人
主权项
地址

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