| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputter ion pump which can be mounted easily in a space necessary to maintain a super high vacuum. SOLUTION: The sputter ion pump is composed of a main body 2 demarcated by a contour-shaped wall formed by arranging three wedge-shaped convex parts 2f with a wide outer peripheral side and a narrow inner peripheral side arranged at every 120°, with its bottom face opened, a cathode electrode 3 formed on the inner wall of the main body formed in a shape same as that of the inner wall, pipe main bodies 4b arranged in the cathode electrode 3, of which openings at both ends are cut in round slices in parallel with the face of the cathode electrode 3, and the inner peripheral side is located on a circumference almost same as that of the face of the cathode electrode 3, anode electrodes 4 of which the inner peripheral side is located on a circumference almost same as that of the inner peripheral side of the cathode electrode 3, a supporting rod 7 concurrently serving as a draw out part of the anode electrode 4 and a mounting part, hung down at a central part of the circumference from a ceiling face side, and three columnar magnets 8 having sector-shaped cross section arranged so as to contact the recess parts formed between outside of the convex parts 2f. An S-pole of the magnets 8 is arranged so as to face an N-pole of adjacent magnets 8. COPYRIGHT: (C)2006,JPO&NCIPI
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