| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a uniformity correction device, which compensates optical effects caused by gaps between adjacent correction members, provides increased uniformity across the slot, and improves critical dimensions. <P>SOLUTION: A uniformity correction device includes multiple correction members and one optical compensation plate. Adjacent correction members are separated by a gap. The optical compensation plate includes a pattern having multiple gap compensation segments. The pattern has an attenuance which is different from that of the other portions of the optical compensation plate. The location of each compensation segment on the optical compensation plate corresponds to the location of the corresponding gap between adjacent correction members in the illumination slot. The width of each gap compensation segment depends on the angle of the light incident on the correction device. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
