发明名称 System and method of planar positioning
摘要 A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.
申请公布号 US2006156569(A1) 申请公布日期 2006.07.20
申请号 US20060327022 申请日期 2006.01.06
申请人 GUNDERSON GARY M 发明人 GUNDERSON GARY M.
分类号 G01D21/00;G01B5/00;G01B21/24;G01N21/95;G01R1/04 主分类号 G01D21/00
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