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发明名称
Generator zur Verwendung in einer mikroelektromechanischen Vorrichtung
摘要
申请公布号
DE60212054(D1)
申请公布日期
2006.07.20
申请号
DE20026012054
申请日期
2002.09.18
申请人
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
KIM, KWANG HO;LEE, YOON PYO;JEON, JAE HAK;SONG, GUI EUN
分类号
B81B3/00;B81B7/02;F15C5/00;H01L41/113;H02K35/02;H02N2/00;H02N2/18
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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