| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize sufficiently strong rigidity of the whole vibrator loading structure so as not to be deformed or destructed easily by an external force or the like, and to suppress various vibration modes other than a driving mode and a detection mode which are useful as a vibration gyro. <P>SOLUTION: When a tuning fork type vibrator 1 is vibrated in the driving mode or the detection mode, a fine vibration displacement domain regarded substantially as a node appears on the bottom surface of the vibrator 1. A cross-shaped support member sticking domain is set on the fine vibration displacement domain. The vibrator 1 and an orthogonal beam type support member 2 are stuck onto the support member sticking domain, and the vibrator 1 is loaded on a package substrate 3. Since the planer shape of the orthogonal beam type support member 2 is a cross shape and the vibrator loading structure formed by sandwiching the cross-shaped orthogonal beam type support member 2 between the vibrator 1 and the package substrate 3 has strong rigidity, inclined deformation or the like of the vibrator 1 caused by an external force generated easily at a wire bonding time or the like is prevented, and various vibration modes unnecessary as the gyro are suppressed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
