TEMPERATURE REGULATING APPARATUS FOR SEMI-CONDUCTOR SUBSTRATE,申请号KR20040075868-传众专利搜索

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发明名称	TEMPERATURE REGULATING APPARATUS FOR SEMI-CONDUCTOR SUBSTRATE
摘要
申请公布号	KR100603239(B1)	申请公布日期	2006.07.20
申请号	KR20040075868	申请日期	2004.09.22
申请人		发明人
分类号	H01L21/683;H01L21/02;H01L21/027;H01L21/20;H01L21/68;H01L23/34;H01L23/38;H01L23/40	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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