FABRICATION METHOD OF SHADOW MASK FOR MANUFACTURING NANO STRUCTURE AND FABRICATION METHOD OF NANO STRUCTURE USING THE SAME,申请号KR20050003459-传众专利搜索

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发明名称	FABRICATION METHOD OF SHADOW MASK FOR MANUFACTURING NANO STRUCTURE AND FABRICATION METHOD OF NANO STRUCTURE USING THE SAME
摘要
申请公布号	KR20060082740(A)	申请公布日期	2006.07.19
申请号	KR20050003459	申请日期	2005.01.13
申请人	KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY	发明人	KIM, YONG CHUL;LEE, SUNG S.
分类号	G03F1/68;B82B3/00;B82Y40/00;G03F1/80	主分类号	G03F1/68
代理机构		代理人
主权项
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