| 摘要 |
PROBLEM TO BE SOLVED: To heighten recovering efficiency of a liquid crystal in decompressing/heating recycle treatment by devising a decompression method for decompressing and pressurizing a liquid crystal panel. SOLUTION: A device for treating the liquid crystal panel has: a treating chamber 2 to house the liquid crystal panel 1; a heating device 3 to heat the inside of the treating chamber 2; a rotary pump 8 to evacuate the treating chamber 2 until its inside is evacuated to a second atmospheric pressure; and a turbo molecular pump 6 placed between the treating chamber 2 and the rotary pump 8 to evacuate the treating chamber 2 until its inside is evacuated to a first atmospheric pressure lower than the second atmospheric pressure. Since the inside of the treating chamber 2 is decompressed to high vacuum with the turbo molecular pump 6, volatilization of the liquid crystal from the liquid crystal panel 1 is promoted, and consequently the recovering efficiency of the liquid crystal in a separation device 7 is heightened. COPYRIGHT: (C)2006,JPO&NCIPI
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