发明名称 MEASUREMENT APPARATUS, DROPLET DISCHARGE APPARATUS, AND MEASUREMENT METHOD
摘要 PROBLEM TO BE SOLVED: To easily detect a deviation in the flying path of a flying object to be measured. SOLUTION: The measurement apparatus comprises a first light generation section for emitting a first optical beam having a first cross-sectional width, a first optical filter for changing the intensity of the first optical beam along the direction of the first cross-sectional width, and a first optical detector for receiving the first optical beam passed through the first optical filter. The first optical detector is placed so that the object to be measured having a velocity component in a first direction passes through the first optical beam at a predetermined part on the optical path between the first optical filter and the first optical detector. At the predetermined part, the first direction is nearly perpendicular to the direction of the first optical beam and the direction of the first cross-sectional width. At the predetermined part, the first cross-sectional width is not less than the width of the object to be measured. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006184161(A) 申请公布日期 2006.07.13
申请号 JP20040379202 申请日期 2004.12.28
申请人 SEIKO EPSON CORP 发明人 KINOSHITA TOYOTARO;MIURA HIROTSUNA
分类号 G01B11/00 主分类号 G01B11/00
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