| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the washing device of the conveyance belt of a depositing apparatus which increases the modulus of cleaning remarkably. <P>SOLUTION: A circulatory system is provided for circulating deionized water to clean the conveyance belt (6) endlessly through the process of heating, depositing and cooling. A circulating route includes a dislodging unit (26 or 28) for removing the impurity substance of deionized water, and a washing machine (3) which cleans the conveyance belt. The dislodging unit includes the multilevel structure of an ejector which ejects the impurity substance out of the circulatory system. The washing machine (3) includes the multilevel structure which cleans the conveyance belt to multiple steps. The exponential increase of the modulus of cleaning of the cleaning by the multilevel structure of the washing machine (3) and the exponential increase of the removal rate of dislodging by the multilevel structure of the dislodging unit reduce the existence density of the impurity substance exponentially in multiplication. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
