| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that an electron beam device with an aberration corrector using a multipole lens is not clear in distinguishing a failure in axial matching in the aberration corrector unit and a failure in axial matching in the portion other than the aberration corrector at the optical axis adjustment and, therefore, it takes a long time for adjustment. SOLUTION: The device is provided with a scanning mode for operating the aberration corrector and a scanning mode for not operating it, and operation of the aberration corrector and capacitor lens or the like is controlled so that the object point of the objective lens may not change in both modes. When the secondary electron images of the testpiece are compared in both modes, the image magnification and focus are not changed and thereby only the effect of the aberration corrector can be distinguished and evaluated for adjustment, and axis adjustment time can be shortened. COPYRIGHT: (C)2006,JPO&NCIPI
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